Portal solution
Key features
- Our linear and rotary stages with direct drive form the basis.
- Automated parallel inspection or processing of multiple objects
- Two axes enable parallel processing and loading
- z-axis with voice coil drive
- Sensor or tool can be positioned horizontally and vertically.
- Adjustable travel ranges
- Modular design based on our beam guidance components
- Also possible on a granite basis
- Can be controlled via PS90+ or integrated into third-party control systems
Typical applications
Surface inspection of semiconductors or optical components, micro-laser processing, micro-assembly, laboratory automation
Competences
LINPOS M
- travel 100 mm, 200 mm, 300 mm and 400 mm
- ironless linear motor with incremental linear measuring system
- suitable for industrial use, as maintenance-free and dust-protected
ROTPOS M
- direct-driven by an ironless torque motor with an incremental angle measuring system
- suitable for industrial use, since maintenance-free
- preloaded precision angular contact ball bearing